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	hartrees
Energy at 0K	-390.522982
Energy at 298.15K
HF Energy	-390.177418
Nuclear repulsion energy	61.568428

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2257	2257	31.93
2	A₁	980	980	184.63
3	A₁	830	830	83.82
4	E	2269	2269	127.28
5	E	2269	2269	127.28
6	E	959	959	88.61
7	E	959	959	88.61
8	E	720	720	52.72
9	E	720	720	52.72

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.520
F2	0.000	0.000	-1.133
H3	0.000	1.416	0.973
H4	-1.226	-0.708	0.973
H5	1.226	-0.708	0.973

	Si1	F2	H3	H4	H5
Si1		1.6531	1.4862	1.4862	1.4862
F2	1.6531		2.5373	2.5373	2.5373
H3	1.4862	2.5373		2.4518	2.4518
H4	1.4862	2.5373	2.4518		2.4518
H5	1.4862	2.5373	2.4518	2.4518

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.734	F2	Si1	H4	107.734
F2	Si1	H5	107.734	H3	Si1	H4	111.151
H3	Si1	H5	111.151	H4	Si1	H5	111.151

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/daug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/daug-cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)