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	hartrees
Energy at 0K	-589.682689
Energy at 298.15K
HF Energy	-589.682689
Nuclear repulsion energy	183.540142

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2384	2384	54.43	79.46	0.16	0.27
2	A₁	845	845	78.79	3.61	0.00	0.00
3	A₁	395	395	79.61	1.00	0.72	0.84
4	E	1002	1002	226.90	0.30	0.75	0.86
4	E	1002	1002	226.81	0.30	0.75	0.86
5	E	819	819	29.61	8.77	0.75	0.86
5	E	819	819	29.60	8.76	0.75	0.86
6	E	281	281	14.80	0.65	0.75	0.86
6	E	281	281	14.79	0.65	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.339
H2	0.000	0.000	1.802
F3	0.000	1.509	-0.243
F4	1.307	-0.755	-0.243
F5	-1.307	-0.755	-0.243

	Si1	H2	F3	F4	F5
Si1		1.4626	1.6175	1.6175	1.6175
H2	1.4626		2.5410	2.5410	2.5410
F3	1.6175	2.5410		2.6142	2.6142
F4	1.6175	2.5410	2.6142		2.6142
F5	1.6175	2.5410	2.6142	2.6142

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	111.075	H2	Si1	F4	111.075
H2	Si1	F5	111.075	F3	Si1	F4	107.821
F3	Si1	F5	107.821	F4	Si1	F5	107.821

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: M06-2X/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Calc. vs exp. Bad Vib. HF vs MP2 Bad scale factors Low excited states Oddities NaCN Is not linear FAQ Help Units Choose Units Energy Bond length Rotational Constant Moment of Inertia Dipole and Quadrupole Polarizability Explanations Hartree cm-1 Debye Credits Just show me Show me a calculated geometry Summary Using older interface Limit Basis sets Method options List Recent molecules Choose a few Molecules Number of atoms By heavy atoms Diatomics InChI Deuterated Dimers Geometry Point group Point group count Bonds types Isodesmic reactions Bad point group Multiple conformers, states Vibrations Big anharmonicity Energy Enthalpy at 0 Kelvin Similar molecules Similar Isomers Cis/trans Tautomers Multiple conformers, states Ions, Dipoles, etc. List Ions Ionization changes point group Dipole Quadrupole Polarizability Proton Affinities Index of CCCBDB Feedback Error form Wants
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Number	Element	Mulliken
1	Si	1.009
2	H	-0.081
3	F	-0.309
4	F	-0.309
5	F	-0.309

	x	y	z	Total
	0.000	0.000	1.704	1.704
CHELPG
AIM
ESP

<r²>	85.558
(<r²>)^1/2	9.250

All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: M06-2X/cc-pVDZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)