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	hartrees
Energy at 0K	-588.641970
Energy at 298.15K
HF Energy	-588.017185
Nuclear repulsion energy	186.600345

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2431	2309	89.27
2	A₁	876	832	81.38
3	A₁	427	406	78.60
4	E	1049	996	268.00
4	E	1049	996	268.00
5	E	874	831	27.59
5	E	874	831	27.59
6	E	306	291	14.23
6	E	306	291	14.23

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.328
H2	0.000	0.000	1.792
F3	0.000	1.485	-0.236
F4	1.286	-0.743	-0.236
F5	-1.286	-0.743	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4646	1.5890	1.5890	1.5890
H2	1.4646		2.5145	2.5145	2.5145
F3	1.5890	2.5145		2.5729	2.5729
F4	1.5890	2.5145	2.5729		2.5729
F5	1.5890	2.5145	2.5729	2.5729

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.797	H2	Si1	F4	110.797
H2	Si1	F5	110.797	F3	Si1	F4	108.114
F3	Si1	F5	108.114	F4	Si1	F5	108.114

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD=FULL/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD=FULL/6-31G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)