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	hartrees
Energy at 0K	-390.490268
Energy at 298.15K
HF Energy	-390.162379
Nuclear repulsion energy	61.657608

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2292	2292	28.11
2	A₁	1020	1020	246.14
3	A₁	868	868	40.17
4	E	2302	2302	138.14
5	E	2302	2302	138.14
6	E	966	966	106.05
7	E	966	966	106.05
8	E	736	736	64.50
9	E	736	736	64.50

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.518
F2	0.000	0.000	-1.133
H3	0.000	1.409	0.981
H4	-1.220	-0.705	0.981
H5	1.220	-0.705	0.981

	Si1	F2	H3	H4	H5
Si1		1.6503	1.4835	1.4835	1.4835
F2	1.6503		2.5406	2.5406	2.5406
H3	1.4835	2.5406		2.4408	2.4408
H4	1.4835	2.5406	2.4408		2.4408
H5	1.4835	2.5406	2.4408	2.4408

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.211	F2	Si1	H4	108.211
F2	Si1	H5	108.211	H3	Si1	H4	110.702
H3	Si1	H5	110.702	H4	Si1	H5	110.702

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD=FULL/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD=FULL/cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)