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18 10 26 16 25

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Species Name Experimental Angle Calculated Angle Difference
SiCl3CH3 methyltrichlorosilane 108.6 108.6 -0.0
SiH2Cl2 dichlorosilane 109.7 110.7 -1.0
SiHCl3 Trichlorosilane 109.4 109.7 -0.3
SiCl4 Silane, tetrachloro- 109.5 109.5 -0.0
SiCl2 Dichlorosilylene 104.2 102.0 2.2
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