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	hartrees
Energy at 0K	-390.455981
Energy at 298.15K
HF Energy	-390.159350
Nuclear repulsion energy	62.400244

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2344	2209	39.22
2	A₁	1029	970	280.96
3	A₁	865	815	88.05
4	E	2355	2219	167.82
5	E	2355	2219	167.82
6	E	1007	949	113.93
7	E	1007	949	113.93
8	E	737	695	60.91
9	E	737	695	60.91

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.512
F2	0.000	0.000	-1.118
H3	0.000	1.397	0.965
H4	-1.210	-0.699	0.965
H5	1.210	-0.699	0.965

	Si1	F2	H3	H4	H5
Si1		1.6294	1.4692	1.4692	1.4692
F2	1.6294		2.5084	2.5084	2.5084
H3	1.4692	2.5084		2.4204	2.4204
H4	1.4692	2.5084	2.4204		2.4204
H5	1.4692	2.5084	2.4204	2.4204

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.987	F2	Si1	H4	107.987
F2	Si1	H5	107.987	H3	Si1	H4	110.913
H3	Si1	H5	110.913	H4	Si1	H5	110.913

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCD/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCD/6-31+G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)