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	hartrees
Energy at 0K	-390.242966
Energy at 298.15K
HF Energy	-390.242966
Nuclear repulsion energy	63.793551

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2359	2143	35.78	300.98	0.02	0.05
2	A₁	1071	973	226.81	1.05	0.72	0.84
3	A₁	934	848	87.10	3.01	0.33	0.50
4	E	2347	2133	174.87	42.69	0.75	0.86
4	E	2347	2133	174.87	42.69	0.75	0.86
5	E	1043	948	113.12	4.12	0.75	0.86
5	E	1043	948	113.12	4.12	0.75	0.86
6	E	783	712	71.71	4.12	0.75	0.86
6	E	783	712	71.71	4.12	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.493
F2	0.000	0.000	-1.085
H3	0.000	1.396	0.955
H4	-1.209	-0.698	0.955
H5	1.209	-0.698	0.955

	Si1	F2	H3	H4	H5
Si1		1.5785	1.4702	1.4702	1.4702
F2	1.5785		2.4719	2.4719	2.4719
H3	1.4702	2.4719		2.4177	2.4177
H4	1.4702	2.4719	2.4177		2.4177
H5	1.4702	2.4719	2.4177	2.4177

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.297	F2	Si1	H4	108.297
F2	Si1	H5	108.297	H3	Si1	H4	110.619
H3	Si1	H5	110.619	H4	Si1	H5	110.619

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: HF/aug-cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	1.147
2	F	-0.634
3	H	-0.171
4	H	-0.171
5	H	-0.171

	x	y	z	Total
	0.000	0.000	1.337	1.337
CHELPG
AIM
ESP

<r²>	35.231
(<r²>)^1/2	5.936

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: HF/aug-cc-pVQZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)