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	hartrees
Energy at 0K	-926.961870
Energy at 298.15K
HF Energy	-926.488361
Nuclear repulsion energy	289.218670

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	?_a	2251	2159
2	?_a	2247	2156
3	?_a	2247	2156
4	?_a	958	919
5	?_a	953	914
6	?_a	953	914
7	?_a	96	92
8	?_a	84	80
9	?_a	82	79
10	?_b	702	673
11	?_b	702	673
12	?_b	673	646
13	?_c	986	946
14	?_c	986	946
15	?_c	977	937
16	?_c	962	923
17	?_c	962	923
18	?_d	2263	2171
19	?_d	2263	2171
20	?_d	2259	2167
21	?_d	2252	2160
22	A'	1043	1001
23	A'	487	467
24	A"	748	718
25	A"	177	170
26	E'	2242	2151
26	E'	2242	2151
27	E'	1016	975
27	E'	1016	975
28	E'	187	180
28	E'	187	180
29	E"	701	673
29	E"	701	673

Atom	x (Å)	y (Å)	z (Å)
N1	0.000	0.000	0.000
Si2	0.000	1.758	0.000
Si3	-1.522	-0.879	0.000
Si4	1.522	-0.879	0.000
H5	-1.425	2.203	0.000
H6	-1.195	-2.335	0.000
H7	2.620	0.133	0.000
H8	0.684	2.311	1.207
H9	0.684	2.311	-1.207
H10	-2.343	-0.563	1.207
H11	-2.343	-0.563	-1.207
H12	1.659	-1.748	1.207
H13	1.659	-1.748	-1.207

	N1	Si2	Si3	Si4	H5	H6	H7	H8	H9	H10	H11	H12	H13
N1		1.7577	1.7577	1.7577	2.6234	2.6234	2.6234	2.6956	2.6956	2.6956	2.6956	2.6956	2.6956
Si2	1.7577		3.0444	3.0444	1.4928	4.2640	3.0831	1.4939	1.4939	3.5121	3.5121	4.0621	4.0621
Si3	1.7577	3.0444		3.0444	3.0831	1.4928	4.2640	4.0621	4.0621	1.4939	1.4939	3.5121	3.5121
Si4	1.7577	3.0444	3.0444		4.2640	3.0831	1.4928	3.5121	3.5121	4.0621	4.0621	1.4939	1.4939
H5	2.6234	1.4928	3.0831	4.2640		4.5439	4.5439	2.4325	2.4325	3.1544	3.1544	5.1553	5.1553
H6	2.6234	4.2640	1.4928	3.0831	4.5439		4.5439	5.1553	5.1553	2.4325	2.4325	3.1544	3.1544
H7	2.6234	3.0831	4.2640	1.4928	4.5439	4.5439		3.1544	3.1544	5.1553	5.1553	2.4325	2.4325
H8	2.6956	1.4939	4.0621	3.5121	2.4325	5.1553	3.1544		2.4145	4.1744	4.8224	4.1744	4.8224
H9	2.6956	1.4939	4.0621	3.5121	2.4325	5.1553	3.1544	2.4145		4.8224	4.1744	4.8224	4.1744
H10	2.6956	3.5121	1.4939	4.0621	3.1544	2.4325	5.1553	4.1744	4.8224		2.4145	4.1744	4.8224
H11	2.6956	3.5121	1.4939	4.0621	3.1544	2.4325	5.1553	4.8224	4.1744	2.4145		4.8224	4.1744
H12	2.6956	4.0621	3.5121	1.4939	5.1553	3.1544	2.4325	4.1744	4.8224	4.1744	4.8224		2.4145
H13	2.6956	4.0621	3.5121	1.4939	5.1553	3.1544	2.4325	4.8224	4.1744	4.8224	4.1744	2.4145

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
N1	Si2	H5	107.344	N1	Si2	H8	111.739
N1	Si2	H9	111.739	N1	Si3	H6	107.344
N1	Si3	H10	111.739	N1	Si3	H11	111.739
N1	Si4	H7	107.344	N1	Si4	H12	111.739
N1	Si4	H13	111.739	Si2	N1	Si3	120.000
Si2	N1	Si4	120.000	Si3	N1	Si4	120.000
H5	Si2	H8	109.071	H5	Si2	H9	109.071
H6	Si3	H10	109.071	H6	Si3	H11	109.071
H7	Si4	H12	109.071	H7	Si4	H13	109.071
H8	Si2	H9	107.829	H10	Si3	H11	107.829
H12	Si4	H13	107.829

All results from a given calculation for N(SiH₃)₃ (trisilylamine)

using model chemistry: QCISD(T)/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for N(SiH3)3 (trisilylamine)

using model chemistry: QCISD(T)/6-31G*

States and conformations

All results from a given calculation for N(SiH₃)₃ (trisilylamine)