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	hartrees
Energy at 0K	-390.682160
Energy at 298.15K
HF Energy	-390.242685
Nuclear repulsion energy	63.193372

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.500
F2	0.000	0.000	-1.098
H3	0.000	1.400	0.962
H4	-1.213	-0.700	0.962
H5	1.213	-0.700	0.962

	Si1	F2	H3	H4	H5
Si1		1.5977	1.4747	1.4747	1.4747
F2	1.5977		2.4910	2.4910	2.4910
H3	1.4747	2.4910		2.4254	2.4254
H4	1.4747	2.4910	2.4254		2.4254
H5	1.4747	2.4910	2.4254	2.4254

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.275	F2	Si1	H4	108.275
F2	Si1	H5	108.275	H3	Si1	H4	110.641
H3	Si1	H5	110.641	H4	Si1	H5	110.641

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVQZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)