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	hartrees
Energy at 0K	-588.814694
Energy at 298.15K
HF Energy	-588.110774
Nuclear repulsion energy	187.194566

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2390	2279	67.75
2	A₁	862	821	95.87
3	A₁	426	406	88.80
4	E	1021	974	300.74
4	E	1021	974	300.74
5	E	869	828	20.30
6	E	310	295	16.29
5	E	869	828	20.30
6	E	310	295	16.29

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.328
H2	0.000	0.000	1.786
F3	0.000	1.480	-0.236
F4	1.282	-0.740	-0.236
F5	-1.282	-0.740	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4581	1.5843	1.5843	1.5843
H2	1.4581		2.5064	2.5064	2.5064
F3	1.5843	2.5064		2.5639	2.5639
F4	1.5843	2.5064	2.5639		2.5639
F5	1.5843	2.5064	2.5639	2.5639

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.873	H2	Si1	F4	110.873
H2	Si1	F5	110.873	F3	Si1	F4	108.034
F3	Si1	F5	108.034	F4	Si1	F5	108.034

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD/6-311G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD/6-311G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)