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	hartrees
Energy at 0K	-390.423785
Energy at 298.15K
HF Energy	-390.147580
Nuclear repulsion energy	62.424910

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2287	2201
2	A₁	1040	1001
3	A₁	894	860
4	E	2297	2210
5	E	2297	2210
6	E	968	931
7	E	968	931
8	E	749	721
9	E	749	721

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.114
H3	0.000	1.407	0.987
H4	-1.219	-0.704	0.987
H5	1.219	-0.704	0.987

	Si1	F2	H3	H4	H5
Si1		1.6189	1.4878	1.4878	1.4878
F2	1.6189		2.5293	2.5293	2.5293
H3	1.4878	2.5293		2.4375	2.4375
H4	1.4878	2.5293	2.4375		2.4375
H5	1.4878	2.5293	2.4375	2.4375

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.933	F2	Si1	H4	108.933
F2	Si1	H5	108.933	H3	Si1	H4	110.004
H3	Si1	H5	110.004	H4	Si1	H5	110.004

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)