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	hartrees
Energy at 0K	-390.690404
Energy at 298.15K
HF Energy	-390.242173
Nuclear repulsion energy	63.096355

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2283	2214
2	A₁	1005	974
3	A₁	885	858
4	E	2287	2218
5	E	2287	2218
6	E	977	947
7	E	977	947
8	E	736	713
9	E	735	713

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.100
H3	0.000	1.401	0.965
H4	-1.213	-0.700	0.965
H5	1.213	-0.700	0.965

	Si1	F2	H3	H4	H5
Si1		1.6008	1.4755	1.4755	1.4755
F2	1.6008		2.4952	2.4952	2.4952
H3	1.4755	2.4952		2.4259	2.4259
H4	1.4755	2.4952	2.4259		2.4259
H5	1.4755	2.4952	2.4259	2.4259

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.339	F2	Si1	H4	108.339
F2	Si1	H5	108.339	H3	Si1	H4	110.580
H3	Si1	H5	110.580	H4	Si1	H5	110.580

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)/cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)/cc-pVQZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)