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	hartrees
Energy at 0K	-489.589517
Energy at 298.15K
HF Energy	-489.088754
Nuclear repulsion energy	115.306288

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2311	2262
2	A₁	974	954
3	A₁	847	829
4	A₁	305	298
5	A₂	738	723
6	B₁	2328	2279
7	B₁	708	693
8	B₂	998	977
9	B₂	896	877

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.464
F2	0.000	1.326	-0.500
F3	0.000	-1.326	-0.500
H4	1.245	0.000	1.258
H5	-1.245	0.000	1.258

	Si1	F2	F3	H4	H5
Si1		1.6391	1.6391	1.4766	1.4766
F2	1.6391		2.6510	2.5295	2.5295
F3	1.6391	2.6510		2.5295	2.5295
H4	1.4766	2.5295	2.5295		2.4897
H5	1.4766	2.5295	2.5295	2.4897

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	F3	107.938	F2	Si1	H4	108.444
F2	Si1	H5	108.444	F3	Si1	H4	108.444
F3	Si1	H5	108.444	H4	Si1	H5	114.925

All results from a given calculation for SiH₂F₂ (difluorosilane)

using model chemistry: CCSD(T)/cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH2F2 (difluorosilane)

using model chemistry: CCSD(T)/cc-pVDZ

States and conformations

All results from a given calculation for SiH₂F₂ (difluorosilane)