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	hartrees
Energy at 0K	-391.153133
Energy at 298.15K
HF Energy	-391.153133
Nuclear repulsion energy	61.603468

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2197	2185	39.92	247.69	0.04	0.08
2	A₁	966	961	217.00	10.17	0.65	0.79
3	A₁	806	802	77.68	7.99	0.39	0.56
4	E	2212	2200	163.25	68.86	0.75	0.86
4	E	2212	2200	163.27	68.87	0.75	0.86
5	E	940	935	81.75	15.81	0.75	0.86
5	E	940	935	81.75	15.81	0.75	0.86
6	E	695	691	45.70	16.56	0.75	0.86
6	E	695	691	45.69	16.56	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.518
F2	0.000	0.000	-1.132
H3	0.000	1.417	0.981
H4	-1.227	-0.708	0.981
H5	1.227	-0.708	0.981

	Si1	F2	H3	H4	H5
Si1		1.6494	1.4903	1.4903	1.4903
F2	1.6494		2.5434	2.5434	2.5434
H3	1.4903	2.5434		2.4536	2.4536
H4	1.4903	2.5434	2.4536		2.4536
H5	1.4903	2.5434	2.4536	2.4536

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.099	F2	Si1	H4	108.099
F2	Si1	H5	108.099	H3	Si1	H4	110.808
H3	Si1	H5	110.808	H4	Si1	H5	110.808

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: BLYP/6-31+G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.612
2	F	-0.365
3	H	-0.082
4	H	-0.082
5	H	-0.082

	x	y	z	Total
	0.000	0.000	1.699	1.699
CHELPG
AIM
ESP

<r²>	36.991
(<r²>)^1/2	6.082

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: BLYP/6-31+G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)