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	hartrees
Energy at 0K	-390.245072
Energy at 298.15K
HF Energy	-390.060763
Nuclear repulsion energy	60.094858

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2208	2065	41.85
2	A₁	1003	938	265.99
3	A₁	811	759	28.69
4	E	2224	2080	180.54
5	E	2224	2080	180.54
6	E	935	874	113.20
7	E	935	874	113.20
8	E	710	664	68.35
9	E	710	664	68.35

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.536
F2	0.000	0.000	-1.168
H3	0.000	1.427	1.004
H4	-1.235	-0.713	1.004
H5	1.235	-0.713	1.004

	Si1	F2	H3	H4	H5
Si1		1.7031	1.5015	1.5015	1.5015
F2	1.7031		2.5980	2.5980	2.5980
H3	1.5015	2.5980		2.4710	2.4710
H4	1.5015	2.5980	2.4710		2.4710
H5	1.5015	2.5980	2.4710	2.4710

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.168	F2	Si1	H4	108.168
F2	Si1	H5	108.168	H3	Si1	H4	110.743
H3	Si1	H5	110.743	H4	Si1	H5	110.743

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CID/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CID/6-31G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)