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	hartrees
Energy at 0K	-585.250095
Energy at 298.15K
HF Energy	-584.875382
Nuclear repulsion energy	184.273560

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2472	2327	112.69
2	A₁	892	839	68.16
3	A₁	420	396	109.17
4	E	1090	1026	236.02
4	E	1090	1026	236.02
5	E	919	865	51.91
5	E	919	865	51.91
6	E	310	292	20.40
6	E	310	292	20.40

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.355
H2	0.000	0.000	1.813
F3	0.000	1.495	-0.251
F4	1.295	-0.748	-0.251
F5	-1.295	-0.748	-0.251

	Si1	H2	F3	F4	F5
Si1		1.4580	1.6139	1.6139	1.6139
H2	1.4580		2.5495	2.5495	2.5495
F3	1.6139	2.5495		2.5902	2.5902
F4	1.6139	2.5495	2.5902		2.5902
F5	1.6139	2.5495	2.5902	2.5902

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	112.085	H2	Si1	F4	112.085
H2	Si1	F5	112.085	F3	Si1	F4	106.735
F3	Si1	F5	106.735	F4	Si1	F5	106.735

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CISD/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CISD/3-21G

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)