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	hartrees
Energy at 0K	-589.569530
Energy at 298.15K	-589.564271
HF Energy	-588.018326
Nuclear repulsion energy	189.025560

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2558	2410	116.07	67.67	0.18	0.30
2	A₁	913	860	99.26	2.89	0.00	0.00
3	A₁	448	422	95.03	0.48	0.74	0.85
4	E	1083	1020	329.16	0.57	0.75	0.86
4	E	1083	1020	329.16	0.57	0.75	0.86
5	E	932	878	28.93	8.56	0.75	0.86
5	E	932	878	28.93	8.56	0.75	0.86
6	E	320	302	16.55	0.36	0.75	0.86
6	E	320	302	16.55	0.36	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.787
F3	0.000	1.489	-0.236
F4	1.290	-0.745	-0.236
F5	-1.290	-0.745	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4601	1.5921	1.5921	1.5921
H2	1.4601		2.5120	2.5120	2.5120
F3	1.5921	2.5120		2.5796	2.5796
F4	1.5921	2.5120	2.5796		2.5796
F5	1.5921	2.5120	2.5796	2.5796

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.877	H2	Si1	F4	110.877
H2	Si1	F5	110.877	F3	Si1	F4	108.030
F3	Si1	F5	108.030	F4	Si1	F5	108.030

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: G3

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: G3

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)