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	hartrees
Energy at 0K	-927.310860
Energy at 298.15K
HF Energy	-926.616789
Nuclear repulsion energy	290.577915

Atom	x (Å)	y (Å)	z (Å)
N1	0.000	0.000	0.000
Si2	0.000	1.751	0.000
Si3	-1.516	-0.875	0.000
Si4	1.516	-0.875	0.000
H5	-1.419	2.189	0.000
H6	-1.186	-2.324	0.000
H7	2.605	0.135	0.000
H8	0.683	2.291	1.202
H9	0.683	2.291	-1.202
H10	-2.326	-0.554	1.202
H11	-2.326	-0.554	-1.202
H12	1.643	-1.737	1.202
H13	1.643	-1.737	-1.202

	N1	Si2	Si3	Si4	H5	H6	H7	H8	H9	H10	H11	H12	H13
N1		1.7507	1.7507	1.7507	2.6086	2.6086	2.6086	2.6761	2.6761	2.6761	2.6761	2.6761	2.6761
Si2	1.7507		3.0323	3.0323	1.4855	4.2433	3.0654	1.4844	1.4844	3.4880	3.4880	4.0386	4.0386
Si3	1.7507	3.0323		3.0323	3.0654	1.4855	4.2433	4.0386	4.0386	1.4844	1.4844	3.4880	3.4880
Si4	1.7507	3.0323	3.0323		4.2433	3.0654	1.4855	3.4880	3.4880	4.0386	4.0386	1.4844	1.4844
H5	2.6086	1.4855	3.0654	4.2433		4.5182	4.5182	2.4241	2.4241	3.1285	3.1285	5.1221	5.1221
H6	2.6086	4.2433	1.4855	3.0654	4.5182		4.5182	5.1221	5.1221	2.4241	2.4241	3.1285	3.1285
H7	2.6086	3.0654	4.2433	1.4855	4.5182	4.5182		3.1285	3.1285	5.1221	5.1221	2.4241	2.4241
H8	2.6761	1.4844	4.0386	3.4880	2.4241	5.1221	3.1285		2.4035	4.1416	4.7884	4.1416	4.7884
H9	2.6761	1.4844	4.0386	3.4880	2.4241	5.1221	3.1285	2.4035		4.7884	4.1416	4.7884	4.1416
H10	2.6761	3.4880	1.4844	4.0386	3.1285	2.4241	5.1221	4.1416	4.7884		2.4035	4.1416	4.7884
H11	2.6761	3.4880	1.4844	4.0386	3.1285	2.4241	5.1221	4.7884	4.1416	2.4035		4.7884	4.1416
H12	2.6761	4.0386	3.4880	1.4844	5.1221	3.1285	2.4241	4.1416	4.7884	4.1416	4.7884		2.4035
H13	2.6761	4.0386	3.4880	1.4844	5.1221	3.1285	2.4241	4.7884	4.1416	4.7884	4.1416	2.4035

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
N1	Si2	H5	107.144	N1	Si2	H8	111.363
N1	Si2	H9	111.363	N1	Si3	H6	107.144
N1	Si3	H10	111.363	N1	Si3	H11	111.363
N1	Si4	H7	107.144	N1	Si4	H12	111.363
N1	Si4	H13	111.363	Si2	N1	Si3	120.000
Si2	N1	Si4	120.000	Si3	N1	Si4	120.000
H5	Si2	H8	109.420	H5	Si2	H9	109.420
H6	Si3	H10	109.420	H6	Si3	H11	109.420
H7	Si4	H12	109.420	H7	Si4	H13	109.420
H8	Si2	H9	108.108	H10	Si3	H11	108.108
H12	Si4	H13	108.108

All results from a given calculation for N(SiH₃)₃ (trisilylamine)

using model chemistry: MP4/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for N(SiH3)3 (trisilylamine)

using model chemistry: MP4/aug-cc-pVTZ

States and conformations

All results from a given calculation for N(SiH₃)₃ (trisilylamine)