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	hartrees
Energy at 0K	-585.284931
Energy at 298.15K
HF Energy	-584.874819
Nuclear repulsion energy	183.607350

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2405	2331	104.20
2	A₁	875	848	60.87
3	A₁	414	401	101.43
4	E	1074	1041	215.93
4	E	1074	1041	215.93
5	E	900	872	49.15
5	E	900	872	49.15
6	E	307	298	19.16
6	E	307	298	19.16

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.357
H2	0.000	0.000	1.824
F3	0.000	1.500	-0.253
F4	1.299	-0.750	-0.253
F5	-1.299	-0.750	-0.253

	Si1	H2	F3	F4	F5
Si1		1.4666	1.6197	1.6197	1.6197
H2	1.4666		2.5621	2.5621	2.5621
F3	1.6197	2.5621		2.5987	2.5987
F4	1.6197	2.5621	2.5987		2.5987
F5	1.6197	2.5621	2.5987	2.5987

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	112.132	H2	Si1	F4	112.132
H2	Si1	F5	112.132	F3	Si1	F4	106.684
F3	Si1	F5	106.684	F4	Si1	F5	106.684

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD/3-21G

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)