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	hartrees
Energy at 0K	-486.774143
Energy at 298.15K
HF Energy	-486.472252
Nuclear repulsion energy	115.500025

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2282	2211	79.78
2	A₁	969	939	215.10
3	A₁	881	854	3.91
4	A₁	333	322	26.57
5	A₂	775	751	0.00
6	B₁	2287	2216	179.73
7	B₁	747	724	189.20
8	B₂	1080	1046	328.22
9	B₂	945	916	4.50

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.478
F2	0.000	1.302	-0.516
F3	0.000	-1.302	-0.516
H4	1.237	0.000	1.301
H5	-1.237	0.000	1.301

	Si1	F2	F3	H4	H5
Si1		1.6382	1.6382	1.4862	1.4862
F2	1.6382		2.6043	2.5552	2.5552
F3	1.6382	2.6043		2.5552	2.5552
H4	1.4862	2.5552	2.5552		2.4749
H5	1.4862	2.5552	2.5552	2.4749

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	F3	105.287	F2	Si1	H4	109.639
F2	Si1	H5	109.639	F3	Si1	H4	109.639
F3	Si1	H5	109.639	H4	Si1	H5	112.731

All results from a given calculation for SiH₂F₂ (difluorosilane)

using model chemistry: QCISD/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH2F2 (difluorosilane)

using model chemistry: QCISD/3-21G

States and conformations

All results from a given calculation for SiH₂F₂ (difluorosilane)