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	hartrees
Energy at 0K	-391.154483
Energy at 298.15K
HF Energy	-391.154483
Nuclear repulsion energy	62.813273

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2294	2178	42.57	185.18	0.04	0.07
2	A₁	1034	982	265.64	14.79	0.60	0.75
3	A₁	901	856	24.24	7.15	0.50	0.66
4	E	2301	2185	196.91	57.88	0.75	0.86
4	E	2301	2185	196.99	57.88	0.75	0.86
5	E	953	905	101.17	23.36	0.75	0.86
5	E	953	905	101.20	23.38	0.75	0.86
6	E	738	701	61.27	10.80	0.75	0.86
6	E	738	701	61.26	10.78	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.500
F2	0.000	0.000	-1.107
H3	0.000	1.400	0.985
H4	-1.212	-0.700	0.985
H5	1.212	-0.700	0.985

	Si1	F2	H3	H4	H5
Si1		1.6073	1.4816	1.4816	1.4816
F2	1.6073		2.5175	2.5175	2.5175
H3	1.4816	2.5175		2.4248	2.4248
H4	1.4816	2.5175	2.4248		2.4248
H5	1.4816	2.5175	2.4248	2.4248

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.109	F2	Si1	H4	109.109
F2	Si1	H5	109.109	H3	Si1	H4	109.831
H3	Si1	H5	109.831	H4	Si1	H5	109.831

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B1B95/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.656
2	F	-0.394
3	H	-0.087
4	H	-0.087
5	H	-0.087

	x	y	z	Total
	0.000	0.000	1.284	1.284
CHELPG
AIM
ESP

<r²>	35.642
(<r²>)^1/2	5.970

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B1B95/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)