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	hartrees
Energy at 0K	-391.088482
Energy at 298.15K
HF Energy	-391.088482
Nuclear repulsion energy	60.288277

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2220	2117	44.68	223.10	0.04	0.07
2	A₁	986	940	201.94	21.57	0.64	0.78
3	A₁	801	764	26.12	7.27	0.38	0.55
4	E	2243	2139	180.74	71.25	0.75	0.86
4	E	2243	2139	180.80	71.22	0.75	0.86
5	E	909	867	82.57	36.16	0.75	0.86
5	E	909	867	82.58	36.17	0.75	0.86
6	E	694	661	56.29	16.92	0.75	0.86
6	E	694	661	56.28	16.93	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.533
F2	0.000	0.000	-1.165
H3	0.000	1.417	1.007
H4	-1.227	-0.708	1.007
H5	1.227	-0.708	1.007

	Si1	F2	H3	H4	H5
Si1		1.6987	1.4936	1.4936	1.4936
F2	1.6987		2.5933	2.5933	2.5933
H3	1.4936	2.5933		2.4536	2.4536
H4	1.4936	2.5933	2.4536		2.4536
H5	1.4936	2.5933	2.4536	2.4536

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.482	F2	Si1	H4	108.482
F2	Si1	H5	108.482	H3	Si1	H4	110.442
H3	Si1	H5	110.442	H4	Si1	H5	110.442

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B1B95/6-31G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.837
2	F	-0.481
3	H	-0.119
4	H	-0.119
5	H	-0.119

	x	y	z	Total
	0.000	0.000	2.361	2.361
CHELPG
AIM
ESP

	x	y	z
x	3.165	0.000	0.000
y	0.000	3.165	-0.000
z	0.000	-0.000	2.872

<r²>	37.977
(<r²>)^1/2	6.163

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B1B95/6-31G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)