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	hartrees
Energy at 0K	-589.422295
Energy at 298.15K
HF Energy	-589.422295
Nuclear repulsion energy	186.938502

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2385	2276	86.10	78.23	0.17	0.29
2	A₁	861	822	74.65	5.14	0.00	0.00
3	A₁	415	396	68.04	0.86	0.72	0.84
4	E	1034	987	242.94	0.44	0.75	0.86
4	E	1034	987	242.93	0.44	0.75	0.86
5	E	853	814	22.07	9.49	0.75	0.86
5	E	853	814	22.08	9.48	0.75	0.86
6	E	296	283	12.06	0.58	0.75	0.86
6	E	296	283	12.06	0.58	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.326
H2	0.000	0.000	1.792
F3	0.000	1.483	-0.235
F4	1.284	-0.742	-0.235
F5	-1.284	-0.742	-0.235

	Si1	H2	F3	F4	F5
Si1		1.4660	1.5858	1.5858	1.5858
H2	1.4660		2.5117	2.5117	2.5117
F3	1.5858	2.5117		2.5690	2.5690
F4	1.5858	2.5117	2.5690		2.5690
F5	1.5858	2.5117	2.5690	2.5690

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.719	H2	Si1	F4	110.719
H2	Si1	F5	110.719	F3	Si1	F4	108.195
F3	Si1	F5	108.195	F4	Si1	F5	108.195

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: HSEh1PBE/6-31G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	1.204
2	H	-0.113
3	F	-0.364
4	F	-0.364
5	F	-0.364

	x	y	z	Total
	0.000	0.000	1.366	1.366
CHELPG
AIM
ESP

	x	y	z
x	2.646	0.000	0.000
y	0.000	2.647	-0.000
z	0.000	-0.000	2.784

<r²>	82.816
(<r²>)^1/2	9.100

All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: HSEh1PBE/6-31G**

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)