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	hartrees
Energy at 0K	-391.131189
Energy at 298.15K
HF Energy	-391.131189
Nuclear repulsion energy	62.721013

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2299	2299	43.02	183.28	0.04	0.07
2	A₁	1043	1043	263.51	14.19	0.62	0.76
3	A₁	904	904	30.30	6.41	0.46	0.63
4	E	2297	2297	199.96	55.54	0.75	0.86
4	E	2297	2297	199.99	55.49	0.75	0.86
5	E	965	965	105.05	22.33	0.75	0.86
5	E	965	965	105.16	22.33	0.75	0.86
6	E	744	744	62.99	10.24	0.75	0.86
6	E	744	744	63.01	10.32	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.501
F2	0.000	0.000	-1.109
H3	0.000	1.400	0.987
H4	-1.213	-0.700	0.987
H5	1.213	-0.700	0.987

	Si1	F2	H3	H4	H5
Si1		1.6103	1.4824	1.4824	1.4824
F2	1.6103		2.5211	2.5211	2.5211
H3	1.4824	2.5211		2.4257	2.4257
H4	1.4824	2.5211	2.4257		2.4257
H5	1.4824	2.5211	2.4257	2.4257

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.140	F2	Si1	H4	109.140
F2	Si1	H5	109.140	H3	Si1	H4	109.800
H3	Si1	H5	109.800	H4	Si1	H5	109.800

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: wB97X-D/6-31G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.774
2	F	-0.404
3	H	-0.123
4	H	-0.123
5	H	-0.123

	x	y	z	Total
	0.000	0.000	1.326	1.326
CHELPG
AIM
ESP

	x	y	z
x	3.179	0.000	0.000
y	0.000	3.183	0.001
z	0.000	0.001	2.758

<r²>	35.719
(<r²>)^1/2	5.977

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: wB97X-D/6-31G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)