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	hartrees
Energy at 0K	-388.813186
Energy at 298.15K
HF Energy	-388.813186
Nuclear repulsion energy	60.698400

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2155	2135	48.61	192.62	0.03	0.06
2	A₁	1027	1017	179.32	23.13	0.62	0.76
3	A₁	842	834	11.65	7.07	0.35	0.52
4	E	2163	2143	167.37	62.38	0.75	0.86
4	E	2163	2143	167.41	62.37	0.75	0.86
5	E	853	845	60.96	39.14	0.75	0.86
5	E	853	845	60.96	39.14	0.75	0.86
6	E	737	730	73.06	10.49	0.75	0.86
6	E	737	730	73.06	10.49	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.520
F2	0.000	0.000	-1.154
H3	0.000	1.416	1.037
H4	-1.227	-0.708	1.037
H5	1.227	-0.708	1.037

	Si1	F2	H3	H4	H5
Si1		1.6737	1.5081	1.5081	1.5081
F2	1.6737		2.6092	2.6092	2.6092
H3	1.5081	2.6092		2.4534	2.4534
H4	1.5081	2.6092	2.4534		2.4534
H5	1.5081	2.6092	2.4534	2.4534

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	110.071	F2	Si1	H4	110.071
F2	Si1	H5	110.071	H3	Si1	H4	108.865
H3	Si1	H5	108.865	H4	Si1	H5	108.865

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: PBEPBE/3-21G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.696
2	F	-0.331
3	H	-0.122
4	H	-0.122
5	H	-0.122

	x	y	z	Total
	0.000	0.000	1.254	1.254
CHELPG
AIM
ESP

<r²>	37.867
(<r²>)^1/2	6.154

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: PBEPBE/3-21G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)