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	hartrees
Energy at 0K	-589.338604
Energy at 298.15K
HF Energy	-588.215306
Nuclear repulsion energy	189.226343

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2463	2378
2	A₁	870	840
3	A₁	425	411
4	E	1020	985
4	E	1020	985
5	E	862	832
5	E	862	832
6	E	307	296
6	E	307	296

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.765
F3	0.000	1.466	-0.232
F4	1.270	-0.733	-0.232
F5	-1.270	-0.733	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4437	1.5667	1.5667	1.5667
H2	1.4437		2.4769	2.4769	2.4769
F3	1.5667	2.4769		2.5390	2.5390
F4	1.5667	2.4769	2.5390		2.5390
F5	1.5667	2.4769	2.5390	2.5390

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.661	H2	Si1	F4	110.661
H2	Si1	F5	110.661	F3	Si1	F4	108.255
F3	Si1	F5	108.255	F4	Si1	F5	108.255

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVQZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)=FULL/cc-pVQZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)