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	hartrees
Energy at 0K	-391.179122
Energy at 298.15K
HF Energy	-391.179122
Nuclear repulsion energy	62.610744

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2289	2195	44.08	188.92	0.04	0.07
2	A₁	1045	1002	257.07	13.89	0.62	0.76
3	A₁	887	850	30.74	6.48	0.41	0.58
4	E	2293	2198	198.79	58.16	0.75	0.86
4	E	2293	2198	198.84	58.15	0.75	0.86
5	E	967	927	102.55	22.29	0.75	0.86
5	E	967	927	102.58	22.30	0.75	0.86
6	E	741	710	59.92	10.60	0.75	0.86
6	E	741	710	59.92	10.60	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.112
H3	0.000	1.399	0.989
H4	-1.211	-0.699	0.989
H5	1.211	-0.699	0.989

	Si1	F2	H3	H4	H5
Si1		1.6150	1.4808	1.4808	1.4808
F2	1.6150		2.5240	2.5240	2.5240
H3	1.4808	2.5240		2.4227	2.4227
H4	1.4808	2.5240	2.4227		2.4227
H5	1.4808	2.5240	2.4227	2.4227

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.158	F2	Si1	H4	109.158
F2	Si1	H5	109.158	H3	Si1	H4	109.782
H3	Si1	H5	109.782	H4	Si1	H5	109.782

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: TPSSh/6-31G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.759
2	F	-0.383
3	H	-0.125
4	H	-0.125
5	H	-0.125

	x	y	z	Total
	0.000	0.000	1.220	1.220
CHELPG
AIM
ESP

<r²>	35.819
(<r²>)^1/2	5.985

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: TPSSh/6-31G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)