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	hartrees
Energy at 0K	-386.324879
Energy at 298.15K
HF Energy	-386.324879
Nuclear repulsion energy	62.082157

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2609	2328	20.00	68.97	0.04	0.07
2	A₁	1127	1006	215.97	9.16	0.70	0.82
3	A₁	881	787	3.02	3.55	0.41	0.58
4	E	2657	2371	43.09	37.61	0.75	0.86
4	E	2657	2371	43.10	37.61	0.75	0.86
5	E	1108	989	71.24	21.21	0.75	0.86
5	E	1108	989	71.25	21.21	0.75	0.86
6	E	765	683	70.33	6.33	0.75	0.86
6	E	765	683	70.33	6.33	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.513
F2	0.000	0.000	-1.135
H3	0.000	1.362	1.008
H4	-1.180	-0.681	1.008
H5	1.180	-0.681	1.008

	Si1	F2	H3	H4	H5
Si1		1.6483	1.4495	1.4495	1.4495
F2	1.6483		2.5397	2.5397	2.5397
H3	1.4495	2.5397		2.3597	2.3597
H4	1.4495	2.5397	2.3597		2.3597
H5	1.4495	2.5397	2.3597	2.3597

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.967	F2	Si1	H4	109.967
F2	Si1	H5	109.967	H3	Si1	H4	108.971
H3	Si1	H5	108.971	H4	Si1	H5	108.971

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B3LYP/STO-3G

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.655
2	F	-0.237
3	H	-0.139
4	H	-0.139
5	H	-0.139

	x	y	z	Total
	0.000	0.000	0.558	0.558
CHELPG
AIM
ESP

<r²>	35.106
(<r²>)^1/2	5.925

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B3LYP/STO-3G

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)