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	hartrees
Energy at 0K	-391.241711
Energy at 298.15K
HF Energy	-391.241711
Nuclear repulsion energy	62.458339

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2256	2182	32.09	244.41	0.04	0.08
2	A₁	1024	990	248.31	16.81	0.68	0.81
3	A₁	857	828	56.49	5.32	0.49	0.66
4	E	2262	2186	154.10	70.99	0.75	0.86
4	E	2262	2186	154.12	70.99	0.75	0.86
5	E	957	925	105.57	25.11	0.75	0.86
5	E	957	925	105.57	25.11	0.75	0.86
6	E	733	709	64.93	16.37	0.75	0.86
6	E	733	709	64.93	16.37	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.506
F2	0.000	0.000	-1.115
H3	0.000	1.402	0.981
H4	-1.215	-0.701	0.981
H5	1.215	-0.701	0.981

	Si1	F2	H3	H4	H5
Si1		1.6212	1.4806	1.4806	1.4806
F2	1.6212		2.5217	2.5217	2.5217
H3	1.4806	2.5217		2.4292	2.4292
H4	1.4806	2.5217	2.4292		2.4292
H5	1.4806	2.5217	2.4292	2.4292

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.689	F2	Si1	H4	108.689
F2	Si1	H5	108.689	H3	Si1	H4	110.242
H3	Si1	H5	110.242	H4	Si1	H5	110.242

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: B3LYP/6-311G**

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.900
2	F	-0.433
3	H	-0.156
4	H	-0.156
5	H	-0.156

	x	y	z	Total
	0.000	0.000	1.547	1.547
CHELPG
AIM
ESP

<r²>	36.211
(<r²>)^1/2	6.018

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: B3LYP/6-311G**

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)