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	hartrees
Energy at 0K	-588.614470
Energy at 298.15K
HF Energy	-588.016717
Nuclear repulsion energy	186.070384

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2469	2328	98.53	72.40	0.18	0.30
2	A₁	863	814	77.68	4.94	0.00	0.00
3	A₁	424	400	75.90	0.84	0.72	0.83
4	E	1039	980	278.79	0.67	0.75	0.86
4	E	1039	980	278.79	0.67	0.75	0.86
5	E	884	834	21.04	10.16	0.75	0.86
5	E	884	834	21.04	10.16	0.75	0.86
6	E	303	286	13.81	0.61	0.75	0.86
6	E	303	286	13.81	0.61	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.327
H2	0.000	0.000	1.788
F3	0.000	1.491	-0.236
F4	1.291	-0.746	-0.236
F5	-1.291	-0.746	-0.236

	Si1	H2	F3	F4	F5
Si1		1.4610	1.5935	1.5935	1.5935
H2	1.4610		2.5133	2.5133	2.5133
F3	1.5935	2.5133		2.5826	2.5826
F4	1.5935	2.5133	2.5826		2.5826
F5	1.5935	2.5133	2.5826	2.5826

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.658	H2	Si1	F4	110.658
H2	Si1	F5	110.658	F3	Si1	F4	108.259
F3	Si1	F5	108.259	F4	Si1	F5	108.259

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP2/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP2/6-31G*

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)