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	hartrees
Energy at 0K	-390.419225
Energy at 298.15K
HF Energy	-390.147693
Nuclear repulsion energy	62.489563

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2297	2169	39.58
2	A₁	1043	985	282.26
3	A₁	899	849	35.29
4	E	2306	2178	186.64
5	E	2306	2178	186.64
6	E	973	918	112.13
7	E	973	918	112.13
8	E	752	711	64.89
9	E	752	711	64.89

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.113
H3	0.000	1.407	0.985
H4	-1.218	-0.703	0.985
H5	1.218	-0.703	0.985

	Si1	F2	H3	H4	H5
Si1		1.6171	1.4866	1.4866	1.4866
F2	1.6171		2.5261	2.5261	2.5261
H3	1.4866	2.5261		2.4362	2.4362
H4	1.4866	2.5261	2.4362		2.4362
H5	1.4866	2.5261	2.4362	2.4362

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.887	F2	Si1	H4	108.887
F2	Si1	H5	108.887	H3	Si1	H4	110.049
H3	Si1	H5	110.049	H4	Si1	H5	110.049

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)