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	hartrees
Energy at 0K	-390.401165
Energy at 298.15K
HF Energy	-390.148007
Nuclear repulsion energy	62.682305

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2343	2169	41.99
2	A₁	1062	983	298.26
3	A₁	909	842	39.80
4	E	2348	2174	202.55
5	E	2348	2174	202.55
6	E	993	920	122.36
7	E	993	920	122.36
8	E	763	707	68.97
9	E	763	707	68.97

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.110
H3	0.000	1.402	0.982
H4	-1.214	-0.701	0.982
H5	1.214	-0.701	0.982

	Si1	F2	H3	H4	H5
Si1		1.6126	1.4811	1.4811	1.4811
F2	1.6126		2.5177	2.5177	2.5177
H3	1.4811	2.5177		2.4275	2.4275
H4	1.4811	2.5177	2.4275		2.4275
H5	1.4811	2.5177	2.4275	2.4275

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.867	F2	Si1	H4	108.867
F2	Si1	H5	108.867	H3	Si1	H4	110.068
H3	Si1	H5	110.068	H4	Si1	H5	110.068

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CISD/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CISD/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)