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	hartrees
Energy at 0K	-390.420256
Energy at 298.15K	-390.423732
HF Energy	-390.147643
Nuclear repulsion energy	62.454058

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2295	2186	40.34
2	A₁	1043	993	280.72
3	A₁	895	852	34.48
4	E	2304	2194	187.57
4	E	2304	2194	187.57
5	E	971	925	111.78
5	E	971	925	111.78
6	E	751	715	64.30
6	E	751	715	64.30

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.502
F2	0.000	0.000	-1.110
H3	0.000	1.408	0.988
H4	-1.219	-0.704	0.988
H5	1.219	-0.704	0.988

	Si1	F2	H3	H4	H5
Si1		1.6124	1.4894	1.4894	1.4894
F2	1.6124		2.5268	2.5268	2.5268
H3	1.4894	2.5268		2.4387	2.4387
H4	1.4894	2.5268	2.4387		2.4387
H5	1.4894	2.5268	2.4387	2.4387

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	109.033	F2	Si1	H4	109.033
F2	Si1	H5	109.033	H3	Si1	H4	109.906
H3	Si1	H5	109.906	H4	Si1	H5	109.906

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)