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	hartrees
Energy at 0K	-390.436839
Energy at 298.15K
HF Energy	-390.147619
Nuclear repulsion energy	62.446031

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2288	2288
2	A₁	1041	1041
3	A₁	898	898
4	E	2299	2299
5	E	2299	2299
6	E	968	968
7	E	967	967
8	E	749	749
9	E	749	749

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.114
H3	0.000	1.407	0.987
H4	-1.218	-0.703	0.987
H5	1.218	-0.703	0.987

	Si1	F2	H3	H4	H5
Si1		1.6183	1.4873	1.4873	1.4873
F2	1.6183		2.5284	2.5284	2.5284
H3	1.4873	2.5284		2.4368	2.4368
H4	1.4873	2.5284	2.4368		2.4368
H5	1.4873	2.5284	2.4368	2.4368

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.929	F2	Si1	H4	108.929
F2	Si1	H5	108.929	H3	Si1	H4	110.008
H3	Si1	H5	110.008	H4	Si1	H5	110.008

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/6-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)=FULL/6-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)