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	hartrees
Energy at 0K	-589.045892
Energy at 298.15K
HF Energy	-588.168038
Nuclear repulsion energy	188.135280

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2399	2288	63.01
2	A₁	422	402	72.13
3	E	995	949	263.70
4	E	849	809	80.86
4	E	995	949	263.70
5	E	848	809	22.63
5	E	848	809	22.63
6	E	304	290	12.56
6	E	304	290	12.56

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.774
F3	0.000	1.475	-0.232
F4	1.278	-0.738	-0.232
F5	-1.278	-0.738	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4530	1.5754	1.5754	1.5754
H2	1.4530		2.4900	2.4900	2.4900
F3	1.5754	2.4900		2.5550	2.5550
F4	1.5754	2.4900	2.5550		2.5550
F5	1.5754	2.4900	2.5550	2.5550

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.550	H2	Si1	F4	110.550
H2	Si1	F5	110.550	F3	Si1	F4	108.371
F3	Si1	F5	108.371	F4	Si1	F5	108.371

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: QCISD/6-311+G(3df,2p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: QCISD/6-311+G(3df,2p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)