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	hartrees
Energy at 0K	-589.269386
Energy at 298.15K
HF Energy	-588.168734
Nuclear repulsion energy	189.134406

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2425	2425	62.41
2	A₁	868	868	85.28
3	A₁	429	429	75.77
4	E	1015	1015	269.38
4	E	1015	1015	269.38
5	E	859	859	24.87
5	E	859	859	24.87
6	E	309	309	13.07
6	E	309	309	13.07

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.320
H2	0.000	0.000	1.768
F3	0.000	1.467	-0.231
F4	1.270	-0.733	-0.231
F5	-1.270	-0.733	-0.231

	Si1	H2	F3	F4	F5
Si1		1.4478	1.5671	1.5671	1.5671
H2	1.4478		2.4795	2.4795	2.4795
F3	1.5671	2.4795		2.5408	2.5408
F4	1.5671	2.4795	2.5408		2.5408
F5	1.5671	2.4795	2.5408	2.5408

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.596	H2	Si1	F4	110.596
H2	Si1	F5	110.596	F3	Si1	F4	108.323
F3	Si1	F5	108.323	F4	Si1	F5	108.323

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3=FULL/6-311+G(3df,2p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3=FULL/6-311+G(3df,2p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)