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	hartrees
Energy at 0K	-390.634466
Energy at 298.15K
HF Energy	-390.221612
Nuclear repulsion energy	62.849725

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2271	2165
2	A₁	999	953
3	A₁	859	820
4	E	2277	2171
5	E	2277	2171
6	E	974	929
7	E	974	929
8	E	730	696
9	E	730	696

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.504
F2	0.000	0.000	-1.106
H3	0.000	1.401	0.967
H4	-1.214	-0.701	0.967
H5	1.214	-0.701	0.967

	Si1	F2	H3	H4	H5
Si1		1.6095	1.4759	1.4759	1.4759
F2	1.6095		2.5021	2.5021	2.5021
H3	1.4759	2.5021		2.4271	2.4271
H4	1.4759	2.5021	2.4271		2.4271
H5	1.4759	2.5021	2.4271	2.4271

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.298	F2	Si1	H4	108.298
F2	Si1	H5	108.298	H3	Si1	H4	110.618
H3	Si1	H5	110.618	H4	Si1	H5	110.618

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: QCISD(T)/6-311+G(3df,2p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: QCISD(T)/6-311+G(3df,2p)

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)