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	hartrees
Energy at 0K	-29.904307
Energy at 298.15K
HF Energy	-29.904307
Nuclear repulsion energy	18.396548

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2252	2252	32.30	185.78	0.05	0.10
2	A₁	987	987	199.00	9.12	0.71	0.83
3	A₁	849	849	71.00	5.55	0.72	0.83
4	E	2264	2264	177.66	76.58	0.75	0.86
4	E	2264	2264	177.76	76.67	0.75	0.86
5	E	954	954	86.82	16.74	0.75	0.86
5	E	954	954	86.90	16.61	0.75	0.86
6	E	725	725	51.83	8.66	0.75	0.86
6	E	725	725	51.81	8.59	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.509
F2	0.000	0.000	-1.117
H3	0.000	1.421	0.977
H4	-1.231	-0.711	0.977
H5	1.231	-0.711	0.977

	Si1	F2	H3	H4	H5
Si1		1.6254	1.4964	1.4964	1.4964
F2	1.6254		2.5302	2.5302	2.5302
H3	1.4964	2.5302		2.4619	2.4619
H4	1.4964	2.5302	2.4619		2.4619
H5	1.4964	2.5302	2.4619	2.4619

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.220	F2	Si1	H4	108.220
F2	Si1	H5	108.220	H3	Si1	H4	110.693
H3	Si1	H5	110.693	H4	Si1	H5	110.693

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: wB97X-D/CEP-31G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.285
2	F	-0.322
3	H	0.012
4	H	0.012
5	H	0.012

	x	y	z	Total
	0.000	0.000	1.696	1.696
CHELPG
AIM
ESP

	x	y	z
x	2.957	0.000	0.000
y	0.000	2.961	-0.000
z	0.000	-0.000	2.791

<r²>	30.239
(<r²>)^1/2	5.499

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: wB97X-D/CEP-31G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)