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	hartrees
Energy at 0K	-29.410226
Energy at 298.15K
HF Energy	-29.410226
Nuclear repulsion energy	18.593360

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2358	2131	37.46	230.99	0.05	0.10
2	A₁	1060	958	266.62	12.54	0.69	0.82
3	A₁	890	804	101.55	3.38	0.38	0.55
4	E	2365	2136	203.87	70.35	0.75	0.86
4	E	2365	2136	203.87	70.35	0.75	0.86
5	E	1033	933	135.06	18.41	0.75	0.86
5	E	1033	933	135.06	18.41	0.75	0.86
6	E	775	700	74.90	12.52	0.75	0.86
6	E	775	700	74.90	12.52	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.104
H3	0.000	1.409	0.964
H4	-1.220	-0.705	0.964
H5	1.220	-0.705	0.964

	Si1	F2	H3	H4	H5
Si1		1.6073	1.4825	1.4825	1.4825
F2	1.6073		2.5022	2.5022	2.5022
H3	1.4825	2.5022		2.4409	2.4409
H4	1.4825	2.5022	2.4409		2.4409
H5	1.4825	2.5022	2.4409	2.4409

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.087	F2	Si1	H4	108.087
F2	Si1	H5	108.087	H3	Si1	H4	110.819
H3	Si1	H5	110.819	H4	Si1	H5	110.819

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: HF/CEP-121G*

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	0.720
2	F	-0.459
3	H	-0.087
4	H	-0.087
5	H	-0.087

	x	y	z	Total
	0.000	0.000	1.668	1.668
CHELPG
AIM
ESP

<r²>	30.174
(<r²>)^1/2	5.493

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: HF/CEP-121G*

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)