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	hartrees
Energy at 0K	-390.519926
Energy at 298.15K
HF Energy	-390.176835
Nuclear repulsion energy	61.578654

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2261	2179	31.65
2	A₁	983	947	187.14
3	A₁	836	805	85.44
4	E	2273	2190	125.58
5	E	2273	2190	125.58
6	E	960	925	89.31
7	E	960	925	89.31
8	E	725	698	54.54
9	E	725	698	54.54

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.520
F2	0.000	0.000	-1.133
H3	0.000	1.416	0.972
H4	-1.226	-0.708	0.972
H5	1.226	-0.708	0.972

	Si1	F2	H3	H4	H5
Si1		1.6526	1.4863	1.4863	1.4863
F2	1.6526		2.5370	2.5370	2.5370
H3	1.4863	2.5370		2.4520	2.4520
H4	1.4863	2.5370	2.4520		2.4520
H5	1.4863	2.5370	2.4520	2.4520

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.731	F2	Si1	H4	107.731
F2	Si1	H5	107.731	H3	Si1	H4	111.154
H3	Si1	H5	111.154	H4	Si1	H5	111.154

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)