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	hartrees
Energy at 0K	-389.871952
Energy at 298.15K	-389.875293
Nuclear repulsion energy	61.490232

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2167	2142	24.74
2	A₁	907	896	148.23
3	A₁	823	814	52.79
4	E	2191	2166	89.80
4	E	2191	2166	89.81
5	E	892	882	55.37
5	E	892	882	55.38
6	E	671	664	40.39
6	E	671	664	40.40

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.519
F2	0.000	0.000	-1.131
H3	0.000	1.432	0.972
H4	-1.240	-0.716	0.972
H5	1.240	-0.716	0.972

	Si1	F2	H3	H4	H5
Si1		1.6491	1.5018	1.5018	1.5018
F2	1.6491		2.5434	2.5434	2.5434
H3	1.5018	2.5434		2.4799	2.4799
H4	1.5018	2.5434	2.4799		2.4799
H5	1.5018	2.5434	2.4799	2.4799

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	107.559	F2	Si1	H4	107.559
F2	Si1	H5	107.559	H3	Si1	H4	111.314
H3	Si1	H5	111.314	H4	Si1	H5	111.314

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: LSDA/aug-cc-pVDZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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Number	Element	Mulliken
1	Si	-0.280
2	F	-0.503
3	H	0.261
4	H	0.261
5	H	0.261

	x	y	z	Total
	0.000	0.000	1.584	1.584
CHELPG
AIM
ESP

<r²>	0.000
(<r²>)^1/2	0.000

All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: LSDA/aug-cc-pVDZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)