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	hartrees
Energy at 0K	-589.182360
Energy at 298.15K
HF Energy	-588.182391
Nuclear repulsion energy	187.592247

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)	Raman Act (Å⁴/u)	Dep P	Dep U
1	A₁	2434	2316	62.47	96.11	0.09	0.16
2	A₁	850	808	78.52	7.99	0.00	0.00
3	A₁	412	392	69.39	0.52	0.51	0.68
4	E	996	948	260.00	0.55	0.75	0.86
4	E	996	948	260.00	0.55	0.75	0.86
5	E	853	812	23.89	3.65	0.75	0.86
5	E	853	812	23.89	3.65	0.75	0.86
6	E	298	283	12.61	0.35	0.75	0.86
6	E	298	283	12.61	0.35	0.75	0.86

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.325
H2	0.000	0.000	1.774
F3	0.000	1.479	-0.234
F4	1.280	-0.739	-0.234
F5	-1.280	-0.739	-0.234

	Si1	H2	F3	F4	F5
Si1		1.4489	1.5808	1.5808	1.5808
H2	1.4489		2.4936	2.4936	2.4936
F3	1.5808	2.4936		2.5610	2.5610
F4	1.5808	2.4936	2.5610		2.5610
F5	1.5808	2.4936	2.5610	2.5610

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.714	H2	Si1	F4	110.714
H2	Si1	F5	110.714	F3	Si1	F4	108.200
F3	Si1	F5	108.200	F4	Si1	F5	108.200

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP2=FULL/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP2=FULL/aug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)