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	hartrees
Energy at 0K	-589.186610
Energy at 298.15K
HF Energy	-588.183065
Nuclear repulsion energy	188.421473

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2411	2293	61.39
2	A₁	867	825	82.60
3	A₁	419	399	73.60
4	E	1014	964	257.79
4	E	1014	964	257.79
5	E	854	812	27.79
6	E	303	288	13.18
5	E	854	812	27.79
6	E	303	288	13.18

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.325
H2	0.000	0.000	1.776
F3	0.000	1.471	-0.234
F4	1.274	-0.736	-0.234
F5	-1.274	-0.736	-0.234

	Si1	H2	F3	F4	F5
Si1		1.4509	1.5737	1.5737	1.5737
H2	1.4509		2.4906	2.4906	2.4906
F3	1.5737	2.4906		2.5480	2.5480
F4	1.5737	2.4906	2.5480		2.5480
F5	1.5737	2.4906	2.5480	2.5480

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.801	H2	Si1	F4	110.801
H2	Si1	F5	110.801	F3	Si1	F4	108.109
F3	Si1	F5	108.109	F4	Si1	F5	108.109

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD=FULL/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD=FULL/aug-cc-pVTZ

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)