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	hartrees
Energy at 0K	-390.642623
Energy at 298.15K
HF Energy	-390.228213
Nuclear repulsion energy	62.878734

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2284	2183	32.38
2	A₁	1002	957	197.70
3	A₁	880	841	74.48
4	E	2288	2187	136.68
5	E	2288	2187	136.68
6	E	979	936	89.45
7	E	979	936	89.45
8	E	739	706	57.62
9	E	739	706	57.62

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.503
F2	0.000	0.000	-1.105
H3	0.000	1.403	0.965
H4	-1.215	-0.702	0.965
H5	1.215	-0.702	0.965

	Si1	F2	H3	H4	H5
Si1		1.6080	1.4771	1.4771	1.4771
F2	1.6080		2.5006	2.5006	2.5006
H3	1.4771	2.5006		2.4301	2.4301
H4	1.4771	2.5006	2.4301		2.4301
H5	1.4771	2.5006	2.4301	2.4301

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.222	F2	Si1	H4	108.222
F2	Si1	H5	108.222	H3	Si1	H4	110.691
H3	Si1	H5	110.691	H4	Si1	H5	110.691

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/aug-cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)