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	hartrees
Energy at 0K	-390.654351
Energy at 298.15K
HF Energy	-390.228045
Nuclear repulsion energy	62.731533

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2272	2204
2	A₁	994	964
3	A₁	868	842
4	E	2279	2211
5	E	2279	2211
6	E	972	943
7	E	972	942
8	E	731	709
9	E	731	709

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.505
F2	0.000	0.000	-1.108
H3	0.000	1.404	0.968
H4	-1.216	-0.702	0.968
H5	1.216	-0.702	0.968

	Si1	F2	H3	H4	H5
Si1		1.6127	1.4784	1.4784	1.4784
F2	1.6127		2.5058	2.5058	2.5058
H3	1.4784	2.5058		2.4320	2.4320
H4	1.4784	2.5058	2.4320		2.4320
H5	1.4784	2.5058	2.4320	2.4320

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.242	F2	Si1	H4	108.242
F2	Si1	H5	108.242	H3	Si1	H4	110.672
H3	Si1	H5	110.672	H4	Si1	H5	110.672

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVTZ

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD(T)/aug-cc-pVTZ

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)