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	hartrees
Energy at 0K	-588.844080
Energy at 298.15K
HF Energy	-588.045475
Nuclear repulsion energy	188.542259

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2403	2272	63.92
2	A₁	870	823	72.47
3	A₁	431	407	67.35
4	E	1032	976	232.88
4	E	1032	976	232.88
5	E	858	811	27.73
6	E	313	296	11.36
5	E	858	811	27.73
6	E	313	296	11.36

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.777
F3	0.000	1.471	-0.232
F4	1.274	-0.736	-0.232
F5	-1.274	-0.736	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4553	1.5719	1.5719	1.5719
H2	1.4553		2.4900	2.4900	2.4900
F3	1.5719	2.4900		2.5483	2.5483
F4	1.5719	2.4900	2.5483		2.5483
F5	1.5719	2.4900	2.5483	2.5483

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.618	H2	Si1	F4	110.618
H2	Si1	F5	110.618	F3	Si1	F4	108.301
F3	Si1	F5	108.301	F4	Si1	F5	108.301

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD/6-31G(2df,p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)