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	hartrees
Energy at 0K	-588.862411
Energy at 298.15K
HF Energy	-588.045209
Nuclear repulsion energy	188.203809

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)
1	A₁	2393	2393
2	A₁	862	862
3	A₁	427	427
4	E	1025	1025
4	E	1025	1025
5	E	851	851
5	E	851	851
6	E	310	310
6	E	310	310

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.778
F3	0.000	1.474	-0.232
F4	1.277	-0.737	-0.232
F5	-1.277	-0.737	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4568	1.5748	1.5748	1.5748
H2	1.4568		2.4931	2.4931	2.4931
F3	1.5748	2.4931		2.5534	2.5534
F4	1.5748	2.4931	2.5534		2.5534
F5	1.5748	2.4931	2.5534	2.5534

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.589	H2	Si1	F4	110.589
H2	Si1	F5	110.589	F3	Si1	F4	108.331
F3	Si1	F5	108.331	F4	Si1	F5	108.331

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCSD(T)/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCSD(T)/6-31G(2df,p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)