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	hartrees
Energy at 0K	-588.839274
Energy at 298.15K
HF Energy	-588.045588
Nuclear repulsion energy	188.704250

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2409	2282	64.39
2	A₁	874	828	74.47
3	A₁	433	410	69.16
4	E	1036	981	238.02
4	E	1036	981	238.02
5	E	861	816	28.39
5	E	861	816	28.39
6	E	314	297	11.61
6	E	314	297	11.61

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.321
H2	0.000	0.000	1.776
F3	0.000	1.470	-0.232
F4	1.273	-0.735	-0.232
F5	-1.273	-0.735	-0.232

	Si1	H2	F3	F4	F5
Si1		1.4548	1.5706	1.5706	1.5706
H2	1.4548		2.4885	2.4885	2.4885
F3	1.5706	2.4885		2.5459	2.5459
F4	1.5706	2.4885	2.5459		2.5459
F5	1.5706	2.4885	2.5459	2.5459

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.624	H2	Si1	F4	110.624
H2	Si1	F5	110.624	F3	Si1	F4	108.294
F3	Si1	F5	108.294	F4	Si1	F5	108.294

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: CCD/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: CCD/6-31G(2df,p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)