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	hartrees
Energy at 0K	-588.877781
Energy at 298.15K
HF Energy	-588.045996
Nuclear repulsion energy	189.487095

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2421	2421	63.75
2	A₁	890	890	76.48
3	A₁	437	437	69.23
4	E	1053	1053	237.07
4	E	1053	1053	237.07
5	E	866	866	30.94
5	E	866	866	30.94
6	E	316	316	11.75
6	E	316	316	11.75

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.322
H2	0.000	0.000	1.774
F3	0.000	1.462	-0.233
F4	1.267	-0.731	-0.233
F5	-1.267	-0.731	-0.233

	Si1	H2	F3	F4	F5
Si1		1.4520	1.5643	1.5643	1.5643
H2	1.4520		2.4836	2.4836	2.4836
F3	1.5643	2.4836		2.5331	2.5331
F4	1.5643	2.4836	2.5331		2.5331
F5	1.5643	2.4836	2.5331	2.5331

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
H2	Si1	F3	110.791	H2	Si1	F4	110.791
H2	Si1	F5	110.791	F3	Si1	F4	108.120
F3	Si1	F5	108.120	F4	Si1	F5	108.120

All results from a given calculation for SiHF₃ (trifluorosilane)

using model chemistry: MP3=FULL/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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HF vs MP2 Bad vib. Calc. vs exp. 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All results from a given calculation for SiHF3 (trifluorosilane)

using model chemistry: MP3=FULL/6-31G(2df,p)

States and conformations

All results from a given calculation for SiHF₃ (trifluorosilane)