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	hartrees
Energy at 0K	-390.535051
Energy at 298.15K
HF Energy	-390.165867
Nuclear repulsion energy	63.154813

Mode Number	Symmetry	Frequency (cm^-1)	Scaled Frequency (cm^-1)	IR Intensities (km mol^-1)
1	A₁	2305	2179	29.36
2	A₁	1030	974	223.03
3	A₁	900	851	40.22
4	E	2309	2183	132.17
5	E	2309	2183	132.17
6	E	994	939	91.96
7	E	994	939	91.96
8	E	745	705	60.08
9	E	745	705	60.08

Atom	x (Å)	y (Å)	z (Å)
Si1	0.000	0.000	0.499
F2	0.000	0.000	-1.100
H3	0.000	1.397	0.971
H4	-1.210	-0.699	0.971
H5	1.210	-0.699	0.971

	Si1	F2	H3	H4	H5
Si1		1.5986	1.4748	1.4748	1.4748
F2	1.5986		2.4979	2.4979	2.4979
H3	1.4748	2.4979		2.4202	2.4202
H4	1.4748	2.4979	2.4202		2.4202
H5	1.4748	2.4979	2.4202	2.4202

atom1	atom2	atom3	angle	atom1	atom2	atom3	angle
F2	Si1	H3	108.660	F2	Si1	H4	108.660
F2	Si1	H5	108.660	H3	Si1	H4	110.271
H3	Si1	H5	110.271	H4	Si1	H5	110.271

All results from a given calculation for SiH₃F (monofluorosilane)

using model chemistry: CCSD/6-31G(2df,p)

States and conformations

	Computational Chemistry Comparison and Benchmark DataBase Release 22 (May 2022) Standard Reference Database 101 National Institute of Standards and Technology
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All results from a given calculation for SiH3F (monofluorosilane)

using model chemistry: CCSD/6-31G(2df,p)

States and conformations

All results from a given calculation for SiH₃F (monofluorosilane)